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previously published March 2008
Since the standards will have to cover a wide range of production equipment
SEMI C31-0708 (technical revision)
and single and multicrystalline wafers and slugs
the consumers) without the need to send the data multiple times to multiple destinations
E05413 - SEMI E54.13 - Specification for Sensor/Actuator Network Communications for Ethernet/IP(TM) Revision:SEMI E54.13-0303 - Superseded previously published March 2008* This Standard has the option to purchase the Current document with a redline document (Current + Redline). The redline document is included with the Current document as a comparison tool to help identify changes that have been made between the Current version and the previous version (Superseded). If differences should exist between the redline document and the Current document, the Current version is the official and authoritative version. 1
US$ 1775.00
US$ 4000.00