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That is to say
a device must implement and support
and to verify ongoing compliance as a part of factory maintenance procedures
5-0211 (Reapproved 0623)
This Standard is intended for use by equipment suppliers
M02200 - SEMI M22 - Specification for Dielectrically Isolated (DI) Wafers StdTpc-Minienvironments That is to sayThis standard was technically approved by the global Silicon Wafer Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on November 21, 2006. It was available at www. semi. org in February 2007. Originally published in 1992; previously published March 2003. NOTICE: This document was balloted and approved for withdrawal in 2007. Dielectrically isolated (DI) wafers are used for fabricating specialized