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even for the same type of resist
SEMI 3D2-0216 (Reapproved 0222)
machine-readable labels on wafer boxes to facilitate communication of data essential for advanced traceability and electronic data exchange systems
1-0414 (technical revision)
both suppliers and their customers may uniformly define product characteristics and quality requirements
M02600 - SEMI M26 - ウェーハの運搬に使用される100 mm，125 mm，150 mm，200 mmウェーハシッピングボックスの再利用ガイド Revision:SEMI M26-0304 (Reapproved 1110) - Inactive even for the same typeglobal Silicon Wafer Committee2010827global Audits and Reviews Subcommittee201010 www. semi. org199520043 100 mm125 mm150 mm200 mm 100 mm125 mm150 mm200 mm Referenced SEMI Standards SEMI M31 Mechanical Specification for Front Opening Shipping Box Used to Transport and Ship 300 mm Wafers SEMI M45 Specification for 300 mm Wafer Shipping System
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