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The oxygen concentration obtained using this Test Method assumes a linear relationship between the interstitial oxygen concentration and the absorption coefficient of the 1107 cm1 band associated with interstitial oxygen in silicon
This Document describes a test method to characterize the composition and thickness of the chromium-enriched oxide layer of stainless steel surfaces and to detect surface contamination in tubing
providing particle control as risk mitigation for particle contamination on the wafer
This test method clarifies the measurement methods and measurement locations
SEMI E142-0305 (first published)
HB00800 - SEMI HB8 - Test Method for Determining Orientation of a Sapphire Single Crystal Revision:SEMI HB8-0217 - Inactive The oxygen concentration obtained usingNOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and continue to be valid for use. The purpose of this Standard is to standardize a test method for sapphire single crystal orientation measurement which includes sapphire cylinder, sapphire ingot, sapphire wafer, etc. It will improve the standardization of
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