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F10800 - SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications StdTpc-Device Tracking shut-off valves

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Description

shut-off valves

and provides some actions as below:

1  Field sequential color technique in the flat panel display has become more and more important

standard mechanical interface (SMIF) pods

This standard was technically approved by the global Physical Interfaces & Carriers Committee

F10800 - SEMI F108 - Guide for Integration of Liquid Chemical Piping Components for Semiconductor, Flat Panel Display, and Solar Cell Manufacturing Applications StdTpc-Device Tracking shut-off valvesThis Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on December 16, 2009. Available at www. semi. org in February 2010. NOTICE: This Standard or Safety Guideline has an Inactive Status because the conditions to maintain Current Status have not been met. Inactive Standards or Safety Guidelines are available from SEMI and

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