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SEMI M53 — Practice for Calibrating Scanning Surface Inspection Systems using Depositions of Monodisperse Reference Spheres on Unpatterned Semiconductor Wafer Surfaces
本スタンダードは，global Flat Panel Display – Materials & Components Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年2月にwww
This Test Method applies to circular samples with diameter greater than 15
flat panel display and solar cell manufacturing
It only defines the necessary parameters of the single crystal sapphire material used for HB-LED wafers
E13900 - SEMI E139 - レシピとパラメータに関する管理の規定（RaP） Revision:SEMI E139-1211 - Superseded SEMI M53 — Practice for, global Information & Control Committee global Audits and Reviews Subcommitteewww. semiviews. orgwww. semi. org > SEMI E139SEMI E139. 3 Factory Information & Control System: FICS 6: FICS FICS SEMISEMI E40 FICS FICS 77. 13 Subordinate Documents: SEMI E139. 1 0310 XML Schema for the RaP PDE SEMI E139. 2 1108 SECS II Protocol for Recipe and Parameter Management (RaP) SEMI E139. 3 1211 XML SOAP Binding for Recipe and Parameter Management Referenced SEMI
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